3621207

Bulk detection of sound waves launched by surface micromachined beam resonators

S. Ardanuc;A. Lal

2

2005

6/27/1905 12:00:00 AM

1171

1174

"Surface waves","Acoustic beams","Electrostatic actuators","Ceramics","Silicon","Acoustical engineering","Optical coupling","Bonding","Resonant frequency","Assembly"

ieee

Ultrasonics Symposium, 2005 IEEE

1051-0117

0-7803-9382-1

conf

10.1109/ULTSYM.2005.1603059

1603059