DocumentCode

3621208

Title

Optimization of acoustic dispersion for high performance thin film BAW resonators

Author

G.G. Fattinger;S. Marksteiner;J. Kaitila;R. Aigner

Volume

2

fYear

2005

fDate

6/27/1905 12:00:00 AM

Firstpage

1175

Lastpage

1178

Keywords

"Transistors","Resonance","Resonant frequency","Cutoff frequency","Acoustic devices","Zinc oxide","Shape","Boundary conditions","Pistons","Metallization"

Publisher

ieee

Conference_Titel

Ultrasonics Symposium, 2005 IEEE

ISSN

1051-0117

Print_ISBN

0-7803-9382-1

Type

conf

DOI

10.1109/ULTSYM.2005.1603060

Filename

1603060