• DocumentCode
    3621209
  • Title

    Suppression of spurious modes in mirror-type thin film BAW resonators using an appropriate shape of the active area

  • Author

    A. Link;E. Schmidhammer;H. Heinze;M. Mayer;M. Schmiedgen;B. Bader;K. Wagner;R. Weigel

  • Volume
    2
  • fYear
    2005
  • fDate
    6/27/1905 12:00:00 AM
  • Firstpage
    1179
  • Lastpage
    1182
  • Keywords
    "Transistors","Shape","Film bulk acoustic resonators","Resonator filters","Electrodes","Band pass filters","Sputtering","Zinc oxide","Insertion loss","Passband"
  • Publisher
    ieee
  • Conference_Titel
    Ultrasonics Symposium, 2005 IEEE
  • ISSN
    1051-0117
  • Print_ISBN
    0-7803-9382-1
  • Type

    conf

  • DOI
    10.1109/ULTSYM.2005.1603061
  • Filename
    1603061
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=3621209