DocumentCode :
3621210
Title :
Simulation and experimental measurements of high-overtoned bulk acoustic resonators (H-BAR)
Author :
S. Alzuaga;J.M. Friedt;S. Ballandras;J. Masson;L. Robert;N. Bazin;B. Guichardaz;D. Gachon
Volume :
2
fYear :
2005
fDate :
6/27/1905 12:00:00 AM
Firstpage :
1183
Lastpage :
1186
Keywords :
"Acoustic measurements","Substrates","Resonator filters","Film bulk acoustic resonators","Resonance","Piezoelectric films","Resonant frequency","Acoustic devices","Aluminum nitride","Q factor"
Publisher :
ieee
Conference_Titel :
Ultrasonics Symposium, 2005 IEEE
ISSN :
1051-0117
Print_ISBN :
0-7803-9382-1
Type :
conf
DOI :
10.1109/ULTSYM.2005.1603062
Filename :
1603062
Link To Document :
https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=49&DC=3621210
