• DocumentCode
    3621277
  • Title

    Piezoelectric bimorph micro-cantilever: a new gas pressure sensor

  • Author

    V. Morteta;R. Petersen;K. Haenena;M. D´Olieslaegera

  • Volume
    3
  • fYear
    2005
  • fDate
    6/27/1905 12:00:00 AM
  • Firstpage
    1456
  • Lastpage
    1459
  • Keywords
    "Gas detectors","Resonant frequency","Temperature measurement","Pressure measurement","Damping","Sensor systems","Piezoelectric films","Resonance","Oscillators","Atomic force microscopy"
  • Publisher
    ieee
  • Conference_Titel
    Ultrasonics Symposium, 2005 IEEE
  • ISSN
    1051-0117
  • Print_ISBN
    0-7803-9382-1
  • Type

    conf

  • DOI
    10.1109/ULTSYM.2005.1603131
  • Filename
    1603131
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=3621277