• DocumentCode
    3621288
  • Title

    Mechanical characterization of Ta and TaN diffusion barrier layers using laser acoustics

  • Author

    D.M. Profunser;J. Vollmann;J. Bryner;J. Dual

  • Volume
    3
  • fYear
    2005
  • fDate
    6/27/1905 12:00:00 AM
  • Firstpage
    1500
  • Lastpage
    1503
  • Keywords
    "Acoustic pulses","Optical pulses","Scanning electron microscopy","Laser excitation","Transmission electron microscopy","Pump lasers","Copper","Transistors","Wavelength measurement","Metallization"
  • Publisher
    ieee
  • Conference_Titel
    Ultrasonics Symposium, 2005 IEEE
  • ISSN
    1051-0117
  • Print_ISBN
    0-7803-9382-1
  • Type

    conf

  • DOI
    10.1109/ULTSYM.2005.1603142
  • Filename
    1603142
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=3621288