DocumentCode
3621298
Title
An ultrasonically levitated non-contact sliding table with the traveling vibrations on fine-ceramic beams
Author
D. Koyama; Takeshi Ide;J.R. Friend;K. Nakamura;S. Ueha
Volume
3
fYear
2005
fDate
6/27/1905 12:00:00 AM
Firstpage
1538
Lastpage
1541
Keywords
"Actuators","Acoustic beams","Acoustic waves","Force measurement","Acoustic propagation","Rail transportation","Ceramics","Displacement measurement","Magnetic levitation","Laboratories"
Publisher
ieee
Conference_Titel
Ultrasonics Symposium, 2005 IEEE
ISSN
1051-0117
Print_ISBN
0-7803-9382-1
Type
conf
DOI
10.1109/ULTSYM.2005.1603152
Filename
1603152
Link To Document