• DocumentCode
    3621308
  • Title

    Design and fabrication of thin film lamb wave resonators utilizing longitudinal wave and interdigital transducers

  • Author

    V. Yantchev;I. Katardjiev

  • Volume
    3
  • fYear
    2005
  • fDate
    6/27/1905 12:00:00 AM
  • Firstpage
    1580
  • Lastpage
    1583
  • Keywords
    "Fabrication","Transistors","Sputtering","Frequency","Biomembranes","Acoustic waves","Piezoelectric films","Piezoelectric transducers","Silicon","Resonance"
  • Publisher
    ieee
  • Conference_Titel
    Ultrasonics Symposium, 2005 IEEE
  • ISSN
    1051-0117
  • Print_ISBN
    0-7803-9382-1
  • Type

    conf

  • DOI
    10.1109/ULTSYM.2005.1603162
  • Filename
    1603162
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=3621308