• DocumentCode
    3621310
  • Title

    Designing capacitively coupled microelectromechanical filters

  • Author

    A.T. Alastalo;V. Kaajakari

  • Volume
    3
  • fYear
    2005
  • fDate
    6/27/1905 12:00:00 AM
  • Firstpage
    1588
  • Lastpage
    1591
  • Keywords
    "Resonator filters","Micromechanical devices","Band pass filters","Capacitance","Frequency","Intermodulation distortion","Insertion loss","Impedance","Voltage","Q factor"
  • Publisher
    ieee
  • Conference_Titel
    Ultrasonics Symposium, 2005 IEEE
  • ISSN
    1051-0117
  • Print_ISBN
    0-7803-9382-1
  • Type

    conf

  • DOI
    10.1109/ULTSYM.2005.1603164
  • Filename
    1603164
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=3621310