3621311

Third-order intermodulation distortion in capacitively-driven VHF micromechanical resonators

Yu-Wei Lin; Sheng-Shian Li; Zeying Ren;C.T.-C. Nguyen

3

2005

6/27/1905 12:00:00 AM

1592

1595

"Intermodulation distortion","Micromechanical devices","Resonator filters","Linearity","Frequency","Electrodes","Q measurement","Filter bank","Signal analysis","Mechanical variables measurement"

ieee

Ultrasonics Symposium, 2005 IEEE

1051-0117

0-7803-9382-1

conf

10.1109/ULTSYM.2005.1603165

1603165