• DocumentCode
    3621311
  • Title

    Third-order intermodulation distortion in capacitively-driven VHF micromechanical resonators

  • Author

    Yu-Wei Lin; Sheng-Shian Li; Zeying Ren;C.T.-C. Nguyen

  • Volume
    3
  • fYear
    2005
  • fDate
    6/27/1905 12:00:00 AM
  • Firstpage
    1592
  • Lastpage
    1595
  • Keywords
    "Intermodulation distortion","Micromechanical devices","Resonator filters","Linearity","Frequency","Electrodes","Q measurement","Filter bank","Signal analysis","Mechanical variables measurement"
  • Publisher
    ieee
  • Conference_Titel
    Ultrasonics Symposium, 2005 IEEE
  • ISSN
    1051-0117
  • Print_ISBN
    0-7803-9382-1
  • Type

    conf

  • DOI
    10.1109/ULTSYM.2005.1603165
  • Filename
    1603165
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=3621311