• DocumentCode
    3621318
  • Title

    Modelling of ultrasonic wave propagation in integrated piezoelectric structures under residual stress

  • Author

    M. Lematre;G. Feuillard;T. Delaunay;M. Lethiecq

  • Volume
    3
  • fYear
    2005
  • fDate
    6/27/1905 12:00:00 AM
  • Firstpage
    1621
  • Lastpage
    1624
  • Keywords
    "Residual stresses","Piezoelectric films","Equations","Piezoelectric materials","Substrates","Thermal stresses","Piezoelectricity","Ceramics","Surface acoustic waves","Acoustic waves"
  • Publisher
    ieee
  • Conference_Titel
    Ultrasonics Symposium, 2005 IEEE
  • ISSN
    1051-0117
  • Print_ISBN
    0-7803-9382-1
  • Type

    conf

  • DOI
    10.1109/ULTSYM.2005.1603172
  • Filename
    1603172
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=3621318