مرکز منطقه ای اطلاع رساني علوم و فناوري - Aluminum nitride thin films on titanium for piezoelectric microelectromechanical systems

DocumentCode :

3621323

Title :

Aluminum nitride thin films on titanium for piezoelectric microelectromechanical systems

Author :

S.E. Boeshore;E.R. Parker;V. Lughi;N.C. MacDonald;B. Markus

Volume :

fYear :

2005

fDate :

6/27/1905 12:00:00 AM

Firstpage :

1641

Lastpage :

1643

Keywords :

"Aluminum nitride","Piezoelectric films","Titanium","Microelectromechanical systems","Sputtering","Substrates","Piezoelectric devices","Diffraction","Optical films","Sputter etching"

Publisher :

ieee

Conference_Titel :

Ultrasonics Symposium, 2005 IEEE

ISSN :

1051-0117

Print_ISBN :

0-7803-9382-1

Type :

conf

DOI :

10.1109/ULTSYM.2005.1603177

Filename :

1603177

Link To Document :

https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=49&DC=3621323