• DocumentCode
    3621323
  • Title

    Aluminum nitride thin films on titanium for piezoelectric microelectromechanical systems

  • Author

    S.E. Boeshore;E.R. Parker;V. Lughi;N.C. MacDonald;B. Markus

  • Volume
    3
  • fYear
    2005
  • fDate
    6/27/1905 12:00:00 AM
  • Firstpage
    1641
  • Lastpage
    1643
  • Keywords
    "Aluminum nitride","Piezoelectric films","Titanium","Microelectromechanical systems","Sputtering","Substrates","Piezoelectric devices","Diffraction","Optical films","Sputter etching"
  • Publisher
    ieee
  • Conference_Titel
    Ultrasonics Symposium, 2005 IEEE
  • ISSN
    1051-0117
  • Print_ISBN
    0-7803-9382-1
  • Type

    conf

  • DOI
    10.1109/ULTSYM.2005.1603177
  • Filename
    1603177
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=3621323