• DocumentCode
    3621365
  • Title

    Resonant electromechanical device fabrication with new thin film materials

  • Author

    J. McPhillips;T.B. Adams;N.J. Donnelly;D. Cornez;S. Lapp;A. Abrar;J.M. Gregg;R.M. Bowman;G. McRobbie;K.J. Kirk;S. Cochran

  • Volume
    3
  • fYear
    2005
  • fDate
    6/27/1905 12:00:00 AM
  • Firstpage
    1812
  • Lastpage
    1815
  • Keywords
    "Resonance","Electromechanical devices","Fabrication","Thin film devices","Piezoelectric materials","Piezoelectric films","Sputtering","Crystalline materials","Pulsed laser deposition","Substrates"
  • Publisher
    ieee
  • Conference_Titel
    Ultrasonics Symposium, 2005 IEEE
  • ISSN
    1051-0117
  • Print_ISBN
    0-7803-9382-1
  • Type

    conf

  • DOI
    10.1109/ULTSYM.2005.1603220
  • Filename
    1603220
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=3621365