• DocumentCode
    3621366
  • Title

    ZnO for thin film BAW devices

  • Author

    J. Molarius;A. Nurmela;T. Pensala;M. Ylilammi;A. Dommann

  • Volume
    3
  • fYear
    2005
  • fDate
    6/27/1905 12:00:00 AM
  • Firstpage
    1816
  • Lastpage
    1819
  • Keywords
    "Zinc oxide","Thin film devices","Bulk acoustic wave devices","Piezoelectric films","Resonator filters","Acoustic waves","Film bulk acoustic resonators","Silicon compounds","Atomic force microscopy","Acoustic devices"
  • Publisher
    ieee
  • Conference_Titel
    Ultrasonics Symposium, 2005 IEEE
  • ISSN
    1051-0117
  • Print_ISBN
    0-7803-9382-1
  • Type

    conf

  • DOI
    10.1109/ULTSYM.2005.1603221
  • Filename
    1603221
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=3621366