DocumentCode
3621368
Title
Electromechanical coupling coefficient k15 of (1120) textured ZnO films
Author
T. Yanagitani;N. Mishima;M. Matsukawa;Y. Watanabe
Volume
3
fYear
2005
fDate
6/27/1905 12:00:00 AM
Firstpage
1824
Lastpage
1827
Keywords
"Zinc oxide","Piezoelectric films","Film bulk acoustic resonators","Substrates","Crystallization","Electrodes","Glass","Radio frequency","Sputtering","Resonance"
Publisher
ieee
Conference_Titel
Ultrasonics Symposium, 2005 IEEE
ISSN
1051-0117
Print_ISBN
0-7803-9382-1
Type
conf
DOI
10.1109/ULTSYM.2005.1603223
Filename
1603223
Link To Document