مرکز منطقه ای اطلاع رساني علوم و فناوري - Higher-order shear mode FBAR using polarization-inverted layers of (1120) textured zno films

DocumentCode :

3621369

Title :

Higher-order shear mode FBAR using polarization-inverted layers of (1120) textured zno films

Author :

M. Yoshinori;T. Yanagitani;M. Matsukawa;Y. Watanabe

Volume :

fYear :

2005

fDate :

6/27/1905 12:00:00 AM

Firstpage :

1828

Lastpage :

1831

Keywords :

"Film bulk acoustic resonators","Zinc oxide","Piezoelectric films","Substrates","Piezoelectric polarization","Crystallization","Anodes","Frequency","Sputtering","Fabrication"

Publisher :

ieee

Conference_Titel :

Ultrasonics Symposium, 2005 IEEE

ISSN :

1051-0117

Print_ISBN :

0-7803-9382-1

Type :

conf

DOI :

10.1109/ULTSYM.2005.1603224

Filename :

1603224

Link To Document :

https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=49&DC=3621369