DocumentCode

3621371

Title

Fabrication and evaluation of an "electrodeless" solidly mounted thin film electroacoustic resonator

Author

J. Enlund;I. Katardjiev;D.M. Martin

Volume

3

fYear

2005

fDate

6/27/1905 12:00:00 AM

Firstpage

1837

Lastpage

1839

Keywords

"Fabrication","Transistors","Electrodes","Resonance","Acoustic devices","Substrates","Optical films","Acoustic waves","Aluminum nitride","Mirrors"

Publisher

ieee

Conference_Titel

Ultrasonics Symposium, 2005 IEEE

ISSN

1051-0117

Print_ISBN

0-7803-9382-1

Type

conf

DOI

10.1109/ULTSYM.2005.1603227

Filename

1603227