• DocumentCode
    3621372
  • Title

    Design and fabrication of a surface micromachined frequency tunable film bulk acoustic resonator with an extended electrostatic tuning range

  • Author

    Wanling Pan;P. Soussan;B. Nauwelaers;H.A.C. Tilmans

  • Volume
    3
  • fYear
    2005
  • fDate
    6/27/1905 12:00:00 AM
  • Firstpage
    1840
  • Lastpage
    1843
  • Keywords
    "Fabrication","Film bulk acoustic resonators","Tuning","Capacitors","Electrodes","Resonant frequency","Electrostatic actuators","Tunable circuits and devices","Voltage","Circuit optimization"
  • Publisher
    ieee
  • Conference_Titel
    Ultrasonics Symposium, 2005 IEEE
  • ISSN
    1051-0117
  • Print_ISBN
    0-7803-9382-1
  • Type

    conf

  • DOI
    10.1109/ULTSYM.2005.1603228
  • Filename
    1603228
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=3621372