• DocumentCode
    3621382
  • Title

    Investigation of Al/Ti metallization performance in terms of acoustomigration stability

  • Author

    H. Schmidt;M. Pekarcikova;S. Menzel;M. Hofmann;R. Kunze

  • Volume
    4
  • fYear
    2005
  • fDate
    6/27/1905 12:00:00 AM
  • Firstpage
    1884
  • Lastpage
    1887
  • Keywords
    "Metallization","Stability","Surface acoustic waves","Nonhomogeneous media","Electrodes","Annealing","Filters","Frequency","Acoustic materials","Alloying"
  • Publisher
    ieee
  • Conference_Titel
    Ultrasonics Symposium, 2005 IEEE
  • ISSN
    1051-0117
  • Print_ISBN
    0-7803-9382-1
  • Type

    conf

  • DOI
    10.1109/ULTSYM.2005.1603240
  • Filename
    1603240
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=3621382