• DocumentCode
    3621399
  • Title

    Backing requirements for CMUT arrays on silicon

  • Author

    S. Berg;A. Ronnekleiv

  • Volume
    4
  • fYear
    2005
  • fDate
    6/27/1905 12:00:00 AM
  • Firstpage
    1952
  • Lastpage
    1955
  • Keywords
    "Silicon","Biomembranes","Bonding","Ultrasonic transducers","Electrodes","Degradation","Biomedical transducers","Acoustic transducers","Voltage","Biomedical imaging"
  • Publisher
    ieee
  • Conference_Titel
    Ultrasonics Symposium, 2005 IEEE
  • ISSN
    1051-0117
  • Print_ISBN
    0-7803-9382-1
  • Type

    conf

  • DOI
    10.1109/ULTSYM.2005.1603257
  • Filename
    1603257
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=3621399