• DocumentCode
    3621440
  • Title

    Direct optical measurement of the Q values of RF-MEMS resonators

  • Author

    O. Holmgren;K. Kokkonen;V. Kaajakari;A. Oja;J.V. Knuuttila

  • Volume
    4
  • fYear
    2005
  • fDate
    6/27/1905 12:00:00 AM
  • Firstpage
    2112
  • Lastpage
    2115
  • Keywords
    "Optical resonators","Q measurement","Radiofrequency microelectromechanical systems","Electric variables measurement","Optical interferometry","Acoustic measurements","Micromechanical devices","Oscillators","Vibrations","Laser modes"
  • Publisher
    ieee
  • Conference_Titel
    Ultrasonics Symposium, 2005 IEEE
  • ISSN
    1051-0117
  • Print_ISBN
    0-7803-9382-1
  • Type

    conf

  • DOI
    10.1109/ULTSYM.2005.1603298
  • Filename
    1603298
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=3621440