DocumentCode
3621537
Title
CMOS devices high performance CMOS
Author
D. Burnett;T. Ohguro
fYear
2005
fDate
6/27/1905 12:00:00 AM
Firstpage
216
Lastpage
216
Keywords
"Tensile stress","Paper technology","Silicon germanium","Germanium silicon alloys","Compressive stress","MOS devices","Displays","Delay","Radio frequency","CMOS technology"
Publisher
ieee
Conference_Titel
Electron Devices Meeting, 2005. IEDM Technical Digest. IEEE International
Print_ISBN
0-7803-9268-X
Type
conf
DOI
10.1109/IEDM.2005.1609310
Filename
1609310
Link To Document