3621539

Detectors, sensors, and MEMS - MEMS technologies and applications

D. Young;J. Brugger

2005

6/27/1905 12:00:00 AM

273

273

"Micromechanical devices","Detectors","CMOS technology","Paper technology","Phased arrays","Radiofrequency microelectromechanical systems","Fabrication","Microelectromechanical systems","Communications technology","Resonance"

ieee

Electron Devices Meeting, 2005. IEDM Technical Digest. IEEE International

0-7803-9268-X

conf

10.1109/IEDM.2005.1609326

1609326