• DocumentCode
    3621539
  • Title

    Detectors, sensors, and MEMS - MEMS technologies and applications

  • Author

    D. Young;J. Brugger

  • fYear
    2005
  • fDate
    6/27/1905 12:00:00 AM
  • Firstpage
    273
  • Lastpage
    273
  • Keywords
    "Micromechanical devices","Detectors","CMOS technology","Paper technology","Phased arrays","Radiofrequency microelectromechanical systems","Fabrication","Microelectromechanical systems","Communications technology","Resonance"
  • Publisher
    ieee
  • Conference_Titel
    Electron Devices Meeting, 2005. IEDM Technical Digest. IEEE International
  • Print_ISBN
    0-7803-9268-X
  • Type

    conf

  • DOI
    10.1109/IEDM.2005.1609326
  • Filename
    1609326
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=3621539