• DocumentCode
    3621902
  • Title

    Computer as Powerful Tool in Reliability Testing of Thin Gate Dielectrics in MOS Devices

  • Author

    L.M. Vracar;B.M. Pesic;N.D. Stojadinovic

  • Author_Institution
    Student Member, IEEE, Faculty of Electronic Engineering, University of Niš
  • Volume
    2
  • fYear
    2005
  • fDate
    6/27/1905 12:00:00 AM
  • Firstpage
    1159
  • Lastpage
    1162
  • Abstract
    The paper describes an approach in the automation of reliability testing of thin gate dielectrics in MOS devices. It is based on using a computer for the full control of high-speed source/measurement equipment. The developed flexible software provides quick and accurate measurements, data acquisition and storage, and results visualization. Application examples concerning the reliability testing of thin Ta2 O5 gate dielectrics are presented and discussed
  • Keywords
    "Dielectric devices","MOS devices","Dielectric measurements","Automation","Automatic testing","Automatic control","Software measurement","Data acquisition","Data visualization","Application software"
  • Publisher
    ieee
  • Conference_Titel
    Computer as a Tool, 2005. EUROCON 2005.The International Conference on
  • Print_ISBN
    1-4244-0049-X
  • Type

    conf

  • DOI
    10.1109/EURCON.2005.1630159
  • Filename
    1630159
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=3621902