Title :
Computer as Powerful Tool in Reliability Testing of Thin Gate Dielectrics in MOS Devices
Author :
L.M. Vracar;B.M. Pesic;N.D. Stojadinovic
Author_Institution :
Student Member, IEEE, Faculty of Electronic Engineering, University of Niš
fDate :
6/27/1905 12:00:00 AM
Abstract :
The paper describes an approach in the automation of reliability testing of thin gate dielectrics in MOS devices. It is based on using a computer for the full control of high-speed source/measurement equipment. The developed flexible software provides quick and accurate measurements, data acquisition and storage, and results visualization. Application examples concerning the reliability testing of thin Ta2 O5 gate dielectrics are presented and discussed
Keywords :
"Dielectric devices","MOS devices","Dielectric measurements","Automation","Automatic testing","Automatic control","Software measurement","Data acquisition","Data visualization","Application software"
Conference_Titel :
Computer as a Tool, 2005. EUROCON 2005.The International Conference on
Print_ISBN :
1-4244-0049-X
DOI :
10.1109/EURCON.2005.1630159
