• DocumentCode
    3621961
  • Title

    Stick-slip based micropositioning stage for transmission electron microscope

  • Author

    O. Holub;M. Spiller;Z. Hurak

  • Author_Institution
    Dept. of Control Eng., Czech Tech. Univ., Prague
  • fYear
    2006
  • fDate
    6/28/1905 12:00:00 AM
  • Firstpage
    484
  • Lastpage
    487
  • Abstract
    This paper presents work that has been done on design of a micropositioning stage for a transmission electron microscope. Topics covered include mechanical design of the positioning stage, sawtooth-like high voltage generator, report on experimental identification of the system, some thoughts and experience with input command shaping, finite-element analysis and design of capacitive 2-axis position sensor and design of signal processing circuitry for this sensor
  • Keywords
    "Transmission electron microscopy","Signal design","Capacitive sensors","Mechanical sensors","Sensor systems","Voltage","Signal generators","Finite element methods","Signal analysis","Process design"
  • Publisher
    ieee
  • Conference_Titel
    Advanced Motion Control, 2006. 9th IEEE International Workshop on
  • Print_ISBN
    0-7803-9511-1
  • Type

    conf

  • DOI
    10.1109/AMC.2006.1631707
  • Filename
    1631707
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=3621961