• DocumentCode
    3622135
  • Title

    Magnetic Field Influence on Silicon Surface Periodic Structures Obtained by Plasma Flow Action

  • Author

    I.P. Dojcinovic;M.M. Kuraica;M. Mitrovic;D. Randjelovic;M. Matic;J. Puric

  • Author_Institution
    Fac. of Phys., Belgrade Univ.
  • fYear
    2006
  • fDate
    6/28/1905 12:00:00 AM
  • Firstpage
    141
  • Lastpage
    144
  • Abstract
    External magnetic field influence on silicon submicron surface periodic structures obtained by the action of nitrogen supersonic quasistationary compression plasma flow (CPF) is studied. CPF is generated by magnetoplasma compressor. It was found that, without external magnetic field, highly-oriented silicon periodic cylindrical shape structures are produced during single pulse surface treatment. Silicon periodic structures were modified by external constant magnetic field. Hexagonal structures of the side length about 500 nm and height of the order of 10 nm, are obtained. Morphology investigation was made by SEM and AFM microscopy
  • Keywords
    "Magnetic fields","Silicon","Periodic structures","Plasmas","Surface morphology","Surface treatment","Scanning electron microscopy","Nitrogen","Shape","Pulse shaping methods"
  • Publisher
    ieee
  • Conference_Titel
    Microelectronics, 2006 25th International Conference on
  • Print_ISBN
    1-4244-0117-8
  • Type

    conf

  • DOI
    10.1109/ICMEL.2006.1650916
  • Filename
    1650916
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=3622135