• DocumentCode
    3622138
  • Title

    Dynamic Elastic Bending in Optically Driven Microcantilever: Surface Strain Effects

  • Author

    D.M. Todorovic;T. Grozdic

  • Author_Institution
    Center for Multidisciplinary Studies, Belgrade Univ.
  • fYear
    2006
  • fDate
    6/28/1905 12:00:00 AM
  • Firstpage
    232
  • Lastpage
    235
  • Abstract
    Dynamic thermoelastic (TE) and electronic deformation (ED) bending in a bimaterial rectangular microcantilever are investigated. The theoretical model for the dynamic elastic vibrations of the microcantilever, including the surface stress effects (the axial force) is given. The components of elastic bending of microcantilever, with dimensions typical for atomic force microscopy are calculated. These investigations are important for many sensors and actuators based on microcantilevers
  • Keywords
    "Capacitive sensors","Resonant frequency","Optical sensors","Signal analysis","Resonance","Microelectronics","Geometrical optics","Springs"
  • Publisher
    ieee
  • Conference_Titel
    Microelectronics, 2006 25th International Conference on
  • Print_ISBN
    1-4244-0117-8
  • Type

    conf

  • DOI
    10.1109/ICMEL.2006.1650938
  • Filename
    1650938
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=3622138