A Simplified Method for Analysis of MEMS Bimaterial Cantilever Elements

This paper presents a simplified method for the calculation of the outputs available from a MEMS bimaterial cantilever. This includes the total work and force, the work against the inertial forces and concentrated forces. The approach is based on the fact that a bimaterial element performing the work against an external force, as in the case of an actuator, or against inertial forces (resonant sensor), has a single neutral plane. In such case, a bimaterial element can be studied as an equivalent mechanical element with an equivalent Young modulus E₀ and an equivalent thickness h = h₁ + h₂