DocumentCode :
3622723
Title :
Parylene BioMEMS
Author :
Yu-Chong Tai
fYear :
2005
fDate :
6/27/1905 12:00:00 AM
Firstpage :
26
Lastpage :
29
Keywords :
"Micromechanical devices","Biological materials","Plasma temperature","Sputter etching","Adhesives","Polymers","Chemical vapor deposition","Resists","Chemical technology","Tensile stress"
Publisher :
ieee
Conference_Titel :
Robotics and Biomimetics (ROBIO). 2005 IEEE International Conference on
Print_ISBN :
0-7803-9315-5
Type :
conf
DOI :
10.1109/ROBIO.2005.246395
Filename :
1708590
Link To Document :
https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=49&DC=3622723
