DocumentCode
3623793
Title
Impact of Low-K Intra-layer Dielectrics on Integration
Author
D. Deschacht;F. Huret
fYear
2002
fDate
6/24/1905 12:00:00 AM
Firstpage
181
Lastpage
184
Keywords
"Dielectrics","Crosstalk","Capacitance","Integrated circuit interconnections","Voltage","Wire","Inductance","Noise level","Coupling circuits","Predictive models"
Publisher
ieee
Conference_Titel
Signal Propagation on Interconnects, 6th IEEE Workshop on. Proceedings
Print_ISBN
0-7803-9821-1
Type
conf
DOI
10.1109/SPI.2002.258310
Filename
4027691
Link To Document