• DocumentCode
    3624071
  • Title

    Reliability Aspects of Integrating High-κ Dielectrics into Back-End-of-Line (BEOL) Process Technology

  • Author

    Tom Remmel;James Walls;Douglas Roberts

  • Author_Institution
    Freescale Semic.
  • fYear
    2006
  • Firstpage
    218
  • Lastpage
    218
  • Keywords
    "Dielectric materials","Optical materials","High-K gate dielectrics","Integrated circuit reliability","Integrated circuit technology","Capacitors","Resistors","Optical resonators"
  • Publisher
    ieee
  • Conference_Titel
    Integrated Reliability Workshop Final Report, 2006 IEEE International
  • ISSN
    1930-8841
  • Print_ISBN
    1-4244-0296-4
  • Electronic_ISBN
    2374-8036
  • Type

    conf

  • DOI
    10.1109/IRWS.2006.305257
  • Filename
    4098734
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=3624071