مرکز منطقه ای اطلاع رساني علوم و فناوري - Reliability Aspects of Integrating High-κ Dielectrics into Back-End-of-Line (BEOL) Process Technology

DocumentCode :

3624071

Title :

Reliability Aspects of Integrating High-κ Dielectrics into Back-End-of-Line (BEOL) Process Technology

Author :

Tom Remmel;James Walls;Douglas Roberts

Author_Institution :

Freescale Semic.

fYear :

2006

Firstpage :

218

Lastpage :

218

Keywords :

"Dielectric materials","Optical materials","High-K gate dielectrics","Integrated circuit reliability","Integrated circuit technology","Capacitors","Resistors","Optical resonators"

Publisher :

ieee

Conference_Titel :

Integrated Reliability Workshop Final Report, 2006 IEEE International

ISSN :

1930-8841

Print_ISBN :

1-4244-0296-4

Electronic_ISBN :

2374-8036

Type :

conf

DOI :

10.1109/IRWS.2006.305257

Filename :

4098734

Link To Document :

https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=49&DC=3624071