Fabrication of MOS - Compatible Ion - Sensitive Devices for Water Pollution Monitoring (Warmer)

Preparation of pH-sensors and structures ready for ion-sensitive coating for in-line water pollution monitoring was the aim of the paper. Au and AgCl electrodes with Au backside contacts were developed using mono-Si substrates. Sequence of manufacturing process was presented. Device series resistance and potentiometric response were positively tested. ISFET pH sensors were manufactured and fully characterized. They were suitable for current use and found to be a basis for further industrialization of the sensor fabrication process.