• DocumentCode
    3625682
  • Title

    Fabrication of MOS - Compatible Ion - Sensitive Devices for Water Pollution Monitoring (Warmer)

  • Author

    M. Zaborowski;B. Jaroszewicz;D. Tomaszewski;P. Prokaryn;E. Malinowska;E. Grygolowicz-Pawlak;P. Grabiec

  • Author_Institution
    Institute of Electron Technology, al. Lotnik?w 32/46, Warsaw, POLAND
  • fYear
    2007
  • fDate
    6/1/2007 12:00:00 AM
  • Firstpage
    477
  • Lastpage
    481
  • Abstract
    Preparation of pH-sensors and structures ready for ion-sensitive coating for in-line water pollution monitoring was the aim of the paper. Au and AgCl electrodes with Au backside contacts were developed using mono-Si substrates. Sequence of manufacturing process was presented. Device series resistance and potentiometric response were positively tested. ISFET pH sensors were manufactured and fully characterized. They were suitable for current use and found to be a basis for further industrialization of the sensor fabrication process.
  • Keywords
    "Fabrication","Water pollution","Monitoring","Gold","Sensor phenomena and characterization","Coatings","Electrodes","Manufacturing processes","Testing","Manufacturing industries"
  • Publisher
    ieee
  • Conference_Titel
    Mixed Design of Integrated Circuits and Systems, 2007. MIXDES ´07. 14th International Conference on
  • Print_ISBN
    83-922632-4-3
  • Type

    conf

  • DOI
    10.1109/MIXDES.2007.4286208
  • Filename
    4286208
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=3625682