Title :
Non-Destructive Material Homogeneity Evaluation using Scanning Millimeter Wave Beam
Author :
A. Laurinavicius;T. Anbinderis;J. Ikonikova;Yu. Prishutov;S. Kuch;V. Gorbatenko;V. N. Derkach
Author_Institution :
Semiconductor Physics Institute, A. Go?tauto str 11, LT-01108 Vilnius, Lithuania. Tel.: +37052626724, Fax.: +37052627123, E-mail: laurinavicius@pfi.lt
fDate :
6/1/2007 12:00:00 AM
Abstract :
This article presents a millimeter wave bridge technique for nondestructive homogeneity characterization of dielectric LaAlO3 wafers. Millimeter waves in the wafer under test are excited locally and the transmitted wave amplitude and phase in different places of the samples are measured. The dependences of the phase shift on the dielectric constant of the wafers are calculated.
Keywords :
"Millimeter wave measurements","Dielectric materials","Millimeter wave technology","Dielectric measurements","Conductivity","Resonance","Dielectric constant","Fabry-Perot","Electromagnetic scattering","Surface resistance"
Conference_Titel :
Physics and Engineering of Microwaves, Millimeter and Submillimeter Waves and Workshop on Terahertz Technologies, 2007. MSMW ´07. The Sixth International Kharkov Symposium on
Print_ISBN :
1-4244-1237-4
DOI :
10.1109/MSMW.2007.4294851
