• DocumentCode
    3625766
  • Title

    Non-Destructive Material Homogeneity Evaluation using Scanning Millimeter Wave Beam

  • Author

    A. Laurinavicius;T. Anbinderis;J. Ikonikova;Yu. Prishutov;S. Kuch;V. Gorbatenko;V. N. Derkach

  • Author_Institution
    Semiconductor Physics Institute, A. Go?tauto str 11, LT-01108 Vilnius, Lithuania. Tel.: +37052626724, Fax.: +37052627123, E-mail: laurinavicius@pfi.lt
  • Volume
    2
  • fYear
    2007
  • fDate
    6/1/2007 12:00:00 AM
  • Firstpage
    893
  • Lastpage
    895
  • Abstract
    This article presents a millimeter wave bridge technique for nondestructive homogeneity characterization of dielectric LaAlO3 wafers. Millimeter waves in the wafer under test are excited locally and the transmitted wave amplitude and phase in different places of the samples are measured. The dependences of the phase shift on the dielectric constant of the wafers are calculated.
  • Keywords
    "Millimeter wave measurements","Dielectric materials","Millimeter wave technology","Dielectric measurements","Conductivity","Resonance","Dielectric constant","Fabry-Perot","Electromagnetic scattering","Surface resistance"
  • Publisher
    ieee
  • Conference_Titel
    Physics and Engineering of Microwaves, Millimeter and Submillimeter Waves and Workshop on Terahertz Technologies, 2007. MSMW ´07. The Sixth International Kharkov Symposium on
  • Print_ISBN
    1-4244-1237-4
  • Type

    conf

  • DOI
    10.1109/MSMW.2007.4294851
  • Filename
    4294851