DocumentCode
3625766
Title
Non-Destructive Material Homogeneity Evaluation using Scanning Millimeter Wave Beam
Author
A. Laurinavicius;T. Anbinderis;J. Ikonikova;Yu. Prishutov;S. Kuch;V. Gorbatenko;V. N. Derkach
Author_Institution
Semiconductor Physics Institute, A. Go?tauto str 11, LT-01108 Vilnius, Lithuania. Tel.: +37052626724, Fax.: +37052627123, E-mail: laurinavicius@pfi.lt
Volume
2
fYear
2007
fDate
6/1/2007 12:00:00 AM
Firstpage
893
Lastpage
895
Abstract
This article presents a millimeter wave bridge technique for nondestructive homogeneity characterization of dielectric LaAlO3 wafers. Millimeter waves in the wafer under test are excited locally and the transmitted wave amplitude and phase in different places of the samples are measured. The dependences of the phase shift on the dielectric constant of the wafers are calculated.
Keywords
"Millimeter wave measurements","Dielectric materials","Millimeter wave technology","Dielectric measurements","Conductivity","Resonance","Dielectric constant","Fabry-Perot","Electromagnetic scattering","Surface resistance"
Publisher
ieee
Conference_Titel
Physics and Engineering of Microwaves, Millimeter and Submillimeter Waves and Workshop on Terahertz Technologies, 2007. MSMW ´07. The Sixth International Kharkov Symposium on
Print_ISBN
1-4244-1237-4
Type
conf
DOI
10.1109/MSMW.2007.4294851
Filename
4294851
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