Title :
Reliability Accelerated Testing of MEMS Acccelerometers
Author :
Marius Bazu;Lucian Galateanu;Virgil Emil Ilian;Jerome Loicq;Serge Habraken;Jean-Paul Colette
Author_Institution :
National Institute for R&D in Microtechnologies -IMT-Bucharest, Romania. E-mail: mbazu@imt.ro
Abstract :
An attempt to assess the reliability of a batch of MEMS accelerometers is presented. The testing plan is application oriented and contains combined tests: thermal and mechanical stresses (two variants: vibration and tilting) were used. The results demonstrated the good reliability of the tested device, the failure rate being smaller than 6.10-8 h-1.
Keywords :
"Life estimation","Micromechanical devices","Accelerometers","Thermal stresses","Failure analysis","Vibrations","Life testing","Microelectronics","Temperature","History"
Conference_Titel :
Semiconductor Conference, 2007. CAS 2007. International
Print_ISBN :
978-1-4244-0847-4
Electronic_ISBN :
2377-0678
DOI :
10.1109/SMICND.2007.4519657
