• DocumentCode
    3627820
  • Title

    Reliability Accelerated Testing of MEMS Acccelerometers

  • Author

    Marius Bazu;Lucian Galateanu;Virgil Emil Ilian;Jerome Loicq;Serge Habraken;Jean-Paul Colette

  • Author_Institution
    National Institute for R&D in Microtechnologies -IMT-Bucharest, Romania. E-mail: mbazu@imt.ro
  • Volume
    1
  • fYear
    2007
  • Firstpage
    103
  • Lastpage
    106
  • Abstract
    An attempt to assess the reliability of a batch of MEMS accelerometers is presented. The testing plan is application oriented and contains combined tests: thermal and mechanical stresses (two variants: vibration and tilting) were used. The results demonstrated the good reliability of the tested device, the failure rate being smaller than 6.10-8 h-1.
  • Keywords
    "Life estimation","Micromechanical devices","Accelerometers","Thermal stresses","Failure analysis","Vibrations","Life testing","Microelectronics","Temperature","History"
  • Publisher
    ieee
  • Conference_Titel
    Semiconductor Conference, 2007. CAS 2007. International
  • ISSN
    1545-827X
  • Print_ISBN
    978-1-4244-0847-4
  • Electronic_ISBN
    2377-0678
  • Type

    conf

  • DOI
    10.1109/SMICND.2007.4519657
  • Filename
    4519657
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=3627820