Title :
Micro- and nanosystems based on vibrating structures
Author_Institution :
Institute of Microelectronic Technologies and Single Crystals, University of Belgrade, Njegoseva 12, 11000, Serbia, Yugoslavia
Abstract :
Invention of the scanning force microscope in 1986 and development of micro and nanofabrication technologies yielded a new generation of vibration based miniature sensors of physical, chemical and biological parameters, with sensitivity which could not be achieved before. This promoted again the research of micro and nanoelectromechanical systems (MEMS and NEMS) in the fields that have been dominated by semiconductor electronics for more than a half of century.
Keywords :
"Chemical technology","Chemical and biological sensors","Nanoelectromechanical systems","Micromechanical devices","Semiconductor device noise","Oscillators","Nanobioscience","Force sensors","Microscopy","Nanofabrication"
Conference_Titel :
Microelectronics, 2008. MIEL 2008. 26th International Conference on
Print_ISBN :
978-1-4244-1881-7
DOI :
10.1109/ICMEL.2008.4559215
