• DocumentCode
    3628150
  • Title

    Vacuum MEMS sensor based on thermopiles - simple model and experimental results

  • Author

    D. Randjelovic;V. Jovanov;Z. Lazic;Z. Djuric;M. Matic

  • Author_Institution
    IHTM - Institute of Microelectronic Technologies and Single Crystals, University of Belgrade, Njego?eva 12, 11000, Serbia, Yugoslavia
  • fYear
    2008
  • fDate
    5/1/2008 12:00:00 AM
  • Firstpage
    367
  • Lastpage
    370
  • Abstract
    This paper presents a simple model of MEMS thermopile based vacuum detector and experimental results obtained for sensors designed and fabricated at IHTM-IMTM. Sensors contain two thermopiles, each with 30 multilayer p+Si/Al thermocouples and p+Si or Al heater. Thermal isolating membrane has sandwich structure consisting of sputtered SiO2 and residual n-Si layer. Dependence of output thermopile voltage on pressure was measured for sensors with different membrane thickness. Tests were performed in pressure range (10-3-105) Pa. Experimental results were compared with theoretical predictions.
  • Keywords
    "Micromechanical devices","Thermal sensors","Biomembranes","Detectors","Nonhomogeneous media","Sandwich structures","Voltage","Thickness measurement","Pressure measurement","Testing"
  • Publisher
    ieee
  • Conference_Titel
    Microelectronics, 2008. MIEL 2008. 26th International Conference on
  • Print_ISBN
    978-1-4244-1881-7
  • Type

    conf

  • DOI
    10.1109/ICMEL.2008.4559298
  • Filename
    4559298
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=3628150