DocumentCode :
3628150
Title :
Vacuum MEMS sensor based on thermopiles - simple model and experimental results
Author :
D. Randjelovic;V. Jovanov;Z. Lazic;Z. Djuric;M. Matic
Author_Institution :
IHTM - Institute of Microelectronic Technologies and Single Crystals, University of Belgrade, Njego?eva 12, 11000, Serbia, Yugoslavia
fYear :
2008
fDate :
5/1/2008 12:00:00 AM
Firstpage :
367
Lastpage :
370
Abstract :
This paper presents a simple model of MEMS thermopile based vacuum detector and experimental results obtained for sensors designed and fabricated at IHTM-IMTM. Sensors contain two thermopiles, each with 30 multilayer p+Si/Al thermocouples and p+Si or Al heater. Thermal isolating membrane has sandwich structure consisting of sputtered SiO2 and residual n-Si layer. Dependence of output thermopile voltage on pressure was measured for sensors with different membrane thickness. Tests were performed in pressure range (10-3-105) Pa. Experimental results were compared with theoretical predictions.
Keywords :
"Micromechanical devices","Thermal sensors","Biomembranes","Detectors","Nonhomogeneous media","Sandwich structures","Voltage","Thickness measurement","Pressure measurement","Testing"
Publisher :
ieee
Conference_Titel :
Microelectronics, 2008. MIEL 2008. 26th International Conference on
Print_ISBN :
978-1-4244-1881-7
Type :
conf
DOI :
10.1109/ICMEL.2008.4559298
Filename :
4559298
Link To Document :
https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=49&DC=3628150
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