Title :
Resonant cantilever bio sensor with integrated grating readout
Author :
H. Ilker Ocakli;Alibey Ozturk;Natali Ozber;Halil Kavakli;Erdem Alaca;Hakan Urey
Author_Institution :
Ko? University, College of Engineering, Istanbul, TURKEY
Abstract :
Microcantilever based biosensor is fabricated and tested. The main features are the simple single mask fabrication, grating based sensitive optical readout, magnetic thin-film actuation, and suitability for parallel array operation. Sub-picogram mass detection sensitivity demonstrated.
Keywords :
"Optical interferometry","Biomedical optical imaging","Optical sensors","Resonant frequency","Optical device fabrication","Silicon","Perpendicular magnetic anisotropy"
Conference_Titel :
Optical MEMs and Nanophotonics, 2008 IEEE/LEOS Internationall Conference on
Print_ISBN :
978-1-4244-1917-3
Electronic_ISBN :
2160-5041
DOI :
10.1109/OMEMS.2008.4607821
