• DocumentCode
    3628680
  • Title

    Resonant cantilever bio sensor with integrated grating readout

  • Author

    H. Ilker Ocakli;Alibey Ozturk;Natali Ozber;Halil Kavakli;Erdem Alaca;Hakan Urey

  • Author_Institution
    Ko? University, College of Engineering, Istanbul, TURKEY
  • fYear
    2008
  • Firstpage
    46
  • Lastpage
    47
  • Abstract
    Microcantilever based biosensor is fabricated and tested. The main features are the simple single mask fabrication, grating based sensitive optical readout, magnetic thin-film actuation, and suitability for parallel array operation. Sub-picogram mass detection sensitivity demonstrated.
  • Keywords
    "Optical interferometry","Biomedical optical imaging","Optical sensors","Resonant frequency","Optical device fabrication","Silicon","Perpendicular magnetic anisotropy"
  • Publisher
    ieee
  • Conference_Titel
    Optical MEMs and Nanophotonics, 2008 IEEE/LEOS Internationall Conference on
  • ISSN
    2160-5033
  • Print_ISBN
    978-1-4244-1917-3
  • Electronic_ISBN
    2160-5041
  • Type

    conf

  • DOI
    10.1109/OMEMS.2008.4607821
  • Filename
    4607821
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=3628680