Fast and high-precision 3D tracking and position measurement with MEMS micromirrors

We demonstrate real-time fast-motion tracking of an object in a 3D volume, while obtaining its precise XYZ co-ordinates. Two separate scanning MEMS micromirror sub-systems track the object in a 20 kHz closed-loop. A demonstration system capable of tracking full-speed human hand motion provides position information at up to 5m distance with 16-bit precision, or ≦20μm precision on the X and Y axes (up/down, left/right,) and precision on the depth (Z-axis) from 10μm to 1.5mm, depending on distance.