Title :
Fast and high-precision 3D tracking and position measurement with MEMS micromirrors
Author :
Veljko Milanovic; Wing Kin Lo
Author_Institution :
Mirrorcle Technologies, Inc., 828 San Pablo Ave., Ste. 109, Albany, CA 94706, USA
Abstract :
We demonstrate real-time fast-motion tracking of an object in a 3D volume, while obtaining its precise XYZ co-ordinates. Two separate scanning MEMS micromirror sub-systems track the object in a 20 kHz closed-loop. A demonstration system capable of tracking full-speed human hand motion provides position information at up to 5m distance with 16-bit precision, or ≦20μm precision on the X and Y axes (up/down, left/right,) and precision on the depth (Z-axis) from 10μm to 1.5mm, depending on distance.
Keywords :
"Target tracking","Mirrors","Distance measurement","Three dimensional displays","Detectors","Tracking","Sensors"
Conference_Titel :
Optical MEMs and Nanophotonics, 2008 IEEE/LEOS Internationall Conference on
Print_ISBN :
978-1-4244-1917-3
Electronic_ISBN :
2160-5041
DOI :
10.1109/OMEMS.2008.4607834