Title :
Mechanically coupled comb drive MEMS stages
Author :
Aslihan Arslan;Caglar Ataman;Sven Holmstrom;Karin Hedsten;H. Rahmi Seren;Hakan Urey;Peter Enoksson
Author_Institution :
Ko? University, Electrical Engineering and Optical Microsystems Laboratory, Istanbul, TURKEY
Abstract :
An electrostatic large clear-aperture in-plane scanner with a novel actuation principle is presented for fast and large stroke scanning applications 9 mum resonant deflection at 11.51 KHz with 100 Vpp excitation is observed.
Keywords :
"Resonant frequency","Couplings","Lenses","Microoptics","Arrays","Damping","Beam steering"
Conference_Titel :
Optical MEMs and Nanophotonics, 2008 IEEE/LEOS Internationall Conference on
Print_ISBN :
978-1-4244-1917-3
Electronic_ISBN :
2160-5041
DOI :
10.1109/OMEMS.2008.4607868
