Title :
Towards integration of glass microlens with silicon comb-drive X-Y microstage
Author :
Karolina Laszczyk;Sylwester Bargiel;Christophe Gorecki;Jerzy Krezel
Author_Institution :
University of Franche-Comt?, FEMTO-ST/CNRS, Besan?on, France
Abstract :
We present the design and the fabrication of a silicon X-Y microstage and a new concept of its integration with a glass microlens to obtain an optical 2D scanner for the miniaturized microscope on-chip.
Keywords :
"Lenses","Microoptics","Silicon","Glass","Fabrication","Bonding","Optical device fabrication"
Conference_Titel :
Optical MEMs and Nanophotonics, 2008 IEEE/LEOS Internationall Conference on
Print_ISBN :
978-1-4244-1917-3
Electronic_ISBN :
2160-5041
DOI :
10.1109/OMEMS.2008.4607882
