Title :
Preparation of transparent conductive AZO thin films for solar cells
Author :
Vladimir Tvarozek;Pavel Sutta;Ivan Novotny;Peter Ballo;Ladislav Harmatha;Sona Flickyngerova;Lucie Prusakova;Marie Netrvalova;Veronika Vavrunkova;Andrea Pullmannova;Erik Vavrinsky;Pavol Gaspierik;Miroslav Mikolasek
Author_Institution :
Department of Microelectronics, Slovak University of Technology, Ilkovicova 3, 812 19, Bratislava, Slovakia, e-mail: vladimir.tvarozek@stuba.sk
Abstract :
A study of the effect of technology parameters (sputtering power, substrate temperature and post-deposition annealing) on structural, electrical and optical properties of aluminium-doped zinc oxide (AZO) thin films was carried out. The optimal technology parameters of preparation were found to get necessary properties of AZO thin films for application in solar cells - the high figure of merit (F ? 4 %/?), low electrical sheet resistance (Rs ? 10 ?/square) and high optical transmittance (T ? 82%, including the glass substrate).
Keywords :
"Conductive films","Photovoltaic cells","Optical films","Sputtering","Orbital calculations","Substrates","Optical refraction","Optical scattering","Optical variables control","Zinc oxide"
Conference_Titel :
Advanced Semiconductor Devices and Microsystems, 2008. ASDAM 2008. International Conference on
Print_ISBN :
978-1-4244-2325-5
DOI :
10.1109/ASDAM.2008.4743336
