• DocumentCode
    3630230
  • Title

    Preparation of transparent conductive AZO thin films for solar cells

  • Author

    Vladimir Tvarozek;Pavel Sutta;Ivan Novotny;Peter Ballo;Ladislav Harmatha;Sona Flickyngerova;Lucie Prusakova;Marie Netrvalova;Veronika Vavrunkova;Andrea Pullmannova;Erik Vavrinsky;Pavol Gaspierik;Miroslav Mikolasek

  • Author_Institution
    Department of Microelectronics, Slovak University of Technology, Ilkovicova 3, 812 19, Bratislava, Slovakia, e-mail: vladimir.tvarozek@stuba.sk
  • fYear
    2008
  • Firstpage
    275
  • Lastpage
    278
  • Abstract
    A study of the effect of technology parameters (sputtering power, substrate temperature and post-deposition annealing) on structural, electrical and optical properties of aluminium-doped zinc oxide (AZO) thin films was carried out. The optimal technology parameters of preparation were found to get necessary properties of AZO thin films for application in solar cells - the high figure of merit (F ? 4 %/?), low electrical sheet resistance (Rs ? 10 ?/square) and high optical transmittance (T ? 82%, including the glass substrate).
  • Keywords
    "Conductive films","Photovoltaic cells","Optical films","Sputtering","Orbital calculations","Substrates","Optical refraction","Optical scattering","Optical variables control","Zinc oxide"
  • Publisher
    ieee
  • Conference_Titel
    Advanced Semiconductor Devices and Microsystems, 2008. ASDAM 2008. International Conference on
  • Print_ISBN
    978-1-4244-2325-5
  • Type

    conf

  • DOI
    10.1109/ASDAM.2008.4743336
  • Filename
    4743336
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=3630230