Title :
Soft simulator for optimal design of curved-profile grating couplers for thin film waveguides
Author :
L. Cristea;M. Caldararu;A. Paraschiv;F. Craciunoiu
Author_Institution :
Inst. of Microtechnol., Bucharest, Romania
Abstract :
We investigated the excitation and de-excitation of TE and TM guided modes in a planar dielectric waveguide with curved-profile grating couplers, and developed a soft simulator for these couplers. This simulator has two functions: (1) optimal design of input and output grating couplers; (2) minimization of the effect of technological parameters variation during fabrication.
Keywords :
"Gratings","Couplers","Transistors","Optical waveguides","Optical surface waves","Etching","Surface waves","Equations","Diffraction","Dielectric thin films"
Conference_Titel :
Semiconductor Conference, 1995. CAS´95 Proceedings., 1995 International
Print_ISBN :
0-7803-2647-4
DOI :
10.1109/SMICND.1995.495056
