• DocumentCode
    3631309
  • Title

    The effects of upper electrode on the dielectric loss tangent of a capacitive-type humidity sensor

  • Author

    C. Roman;O. Bodea;N. Santa;N. Prodan;A. Levi;E. Cordos

  • Author_Institution
    Res. Center for Anal. Instrum., Cluj-Napoca, Romania
  • fYear
    1995
  • Firstpage
    481
  • Lastpage
    484
  • Abstract
    The capacitive-type humidity sensor were prepared using poly(methyl methacrylate) (PMMA) as the sensing material and three kinds of metals for the upper electrode: chromium, gold and aluminum. The effect of the upper electrode on the dielectric loss tangent was examined. It was proposed a sensing mechanism which can explain the dielectric behavior.
  • Keywords
    "Dielectric losses","Electrodes","Humidity","Capacitive sensors","Dielectric loss measurement","Polymers","Inorganic materials","Atomic layer deposition","Dielectric materials","Gold"
  • Publisher
    ieee
  • Conference_Titel
    Semiconductor Conference, 1995. CAS´95 Proceedings., 1995 International
  • Print_ISBN
    0-7803-2647-4
  • Type

    conf

  • DOI
    10.1109/SMICND.1995.495065
  • Filename
    495065
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=3631309