A study on inteference between 3D MEMS inductor and VCO

We have inquired further into the interference effect between active circuit and spiral inductors. Through the VCO´s integrated with MEMS inductors, we investigated the phase noise characteristics according to inductor´s position in circuits. These experimental results were further studied by electromagnetic theory and simulation. We have concluded that the magnetic field induced by inductor have small magnitudes, thus they do not affect the MOSFET operation and the vertical component of the inductor electric field affects the transistor operation and output by theoretical approach. We have simulated roughly these effects of electric field induced by inductor using CLESICO, mixed-mode simulator. These simulation results show that the currents induced by noise voltage source are small but cannot be bypassed.