• DocumentCode
    3633803
  • Title

    Photonic integration in a commercial scaled bulk-CMOS process

  • Author

    J. S. Orcutt;A. Khilo;M. A. Popovic;C. W. Holzwarth;H. Li;J. Sun;B. Moss;M. S. Dahlem;E. P. Ippen;J. L. Hoyt;V. Stojanovic;F. X. Kartner;H. I. Smith;R. J. Ram

  • Author_Institution
    Massachusetts Institute of Technology, 77 Massachusetts Ave, Cambridge, MA 02139
  • fYear
    2009
  • Firstpage
    1
  • Lastpage
    2
  • Abstract
    We demonstrate the first photonic chip designed for a commercial bulk CMOS process (65 nm-node) using standard process layers combined with post-processing, enabling dense photonic integration with high-performance microprocessor electronics.
  • Keywords
    "Optical waveguides","Photonic integrated circuits","CMOS process","Silicon","Integrated circuit interconnections","Optical losses","Microprocessors","Optical resonators","Optical filters","Testing"
  • Publisher
    ieee
  • Conference_Titel
    Photonics in Switching, 2009. PS ´09. International Conference on
  • ISSN
    2155-8507
  • Print_ISBN
    978-1-4244-3857-0
  • Electronic_ISBN
    2155-8515
  • Type

    conf

  • DOI
    10.1109/PS.2009.5307769
  • Filename
    5307769
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=3633803