A simple approach for modelling and simulation monolithic inductors

This paper proposes one possible method for modelling silicon based RF meander type inductors. Based on the presented electrical model specialised software (Helix Meta2) for obtaining inductor electrical parameters is developed. In order to verify simulation results test inductor structures are fabricated in the standard silicon technology. Their characteristics simulated with Helix Meta2 are compared to the ones obtained by experimental characterisation and simulation using commercial electromagnetic simulator. Good agreement of results is achieved and demonstrated on two test samples.