• DocumentCode
    3634759
  • Title

    Experimental study of Ti/Pt thin film heater and temperature sensors on Si platform

  • Author

    D. Resnik;D. Vrtačnik;U. Aljančič;M. Možek;S. Amon

  • Author_Institution
    Laboratory of Microsensor Structures and Electronics, Faculty of Electrical Engineering, University of Ljubljana, Trzaska 25, 1000, SLOVENIA
  • fYear
    2009
  • Firstpage
    635
  • Lastpage
    638
  • Abstract
    Thin film Ti/Pt heaters and temperature sensors were designed and fabricated to provide controlled heating of meandered microchannels realized on the opposite side of the Si platform. Ti/Pt heaters and temperature sensors were fabricated simultaneously by DC sputtering on SiO2/Si substrate. Annealing temperature in the range 400-700?C was found to influence significantly the sheet resistance and consequently the final resistance of deposited Ti/Pt layers. Measured temperature coefficient of resistance for temperature sensors and heaters was between 1440 and 1700 ppm. Improved temperature response and heating up to 250?C with 27% decrease of power consumption was obtained by Pyrex cavity insulation.
  • Keywords
    "Semiconductor thin films","Thin film sensors","Temperature sensors","Sputtering","Heating","Temperature measurement","Temperature control","Microchannel","Substrates","Annealing"
  • Publisher
    ieee
  • Conference_Titel
    Sensors, 2009 IEEE
  • ISSN
    1930-0395
  • Print_ISBN
    978-1-4244-4548-6
  • Type

    conf

  • DOI
    10.1109/ICSENS.2009.5398328
  • Filename
    5398328
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=3634759