• DocumentCode
    3635138
  • Title

    The efficient simulation of point defects diffusion by an adaptive multigrid method

  • Author

    D. Pantic;S. Mijalkovic;N. Stojadinovic

  • Author_Institution
    Faculty of Electronic Engineering, University of Ni?, 18000 Ni?, Yugoslavia
  • fYear
    1992
  • Firstpage
    789
  • Lastpage
    792
  • Abstract
    The central goal of this paper is to demonstrate the efficiency of adaptive multilevel numerical method based on full multigrid algorithm for the simulation of point defects diffusion. This numerical approach is implemented in process simulator MUSIC [1] and it is applied for the simulation of interstitials and vacancies diffusion during the local oxidation process.
  • Keywords
    "Multigrid methods","Silicon","Multiple signal classification","Oxidation","Impurities","Equations","Computational modeling","Grid computing","Microelectronics","Semiconductor devices"
  • Publisher
    ieee
  • Conference_Titel
    Solid State Device Research Conference, 1992. ESSDERC ´92. 22nd European
  • Print_ISBN
    0-444-89478-0
  • Type

    conf

  • Filename
    5435409
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=3635138