Title :
The efficient simulation of point defects diffusion by an adaptive multigrid method
Author :
D. Pantic;S. Mijalkovic;N. Stojadinovic
Author_Institution :
Faculty of Electronic Engineering, University of Ni?, 18000 Ni?, Yugoslavia
Abstract :
The central goal of this paper is to demonstrate the efficiency of adaptive multilevel numerical method based on full multigrid algorithm for the simulation of point defects diffusion. This numerical approach is implemented in process simulator MUSIC [1] and it is applied for the simulation of interstitials and vacancies diffusion during the local oxidation process.
Keywords :
"Multigrid methods","Silicon","Multiple signal classification","Oxidation","Impurities","Equations","Computational modeling","Grid computing","Microelectronics","Semiconductor devices"
Conference_Titel :
Solid State Device Research Conference, 1992. ESSDERC ´92. 22nd European
Print_ISBN :
0-444-89478-0
