Title :
Surface acoustic wave interdigital transducer response to Deep UV illumination in AlGaN/sapphire
Author :
Venkata S. Chivukula;Daumantas Ciplys;Michael S. Shur;Jinwei Yang;Remis Gaska
Author_Institution :
Center for Integrated Electronics, Rensselaer Polytechnic Institute, Troy, New York 12180, USA
Abstract :
Aluminum-gallium nitride (AlGaN) alloys are promising materials for wavelength-tunable solar-blind surface acoustic wave (SAW) ultraviolet (UV) sensors. We investigate the physical origin of SAW frequency/phase change and study the impact of UV illumination on performance of SAW interdigital transducers (IDT) deposited on AlGaN surface. We correlate these investigations with low frequency measurements of IDT photocapacitance and photoconductance. Our results are important for design and development of efficient SAW devices for UV sensing and high performance filters with tunable frequency response for signal processing applications.
Keywords :
"Surface acoustic waves","Acoustic waves","Acoustic transducers","Lighting","Aluminum gallium nitride","Surface acoustic wave devices","Aluminum alloys","Phase change materials","Acoustic materials","Acoustic sensors"
Conference_Titel :
Ultrasonics Symposium (IUS), 2009 IEEE International
Print_ISBN :
978-1-4244-4389-5
Electronic_ISBN :
1948-5727
DOI :
10.1109/ULTSYM.2009.5441821
