• DocumentCode
    3636073
  • Title

    Modelling of thermopile-based MEMS sensors using analytical and numerical techniques

  • Author

    D. Randjelovi?;C. Tsamis;G. Kaltsas;A. Petropoulos;?. Lazi?

  • Author_Institution
    IHTM-IMTM University of Belgrade, Njego?eva 12, 11000 Belgrade, Serbia
  • fYear
    2010
  • fDate
    5/1/2010 12:00:00 AM
  • Firstpage
    217
  • Lastpage
    220
  • Abstract
    In this paper the thermoelectrical behavior of thermopile-based MEMS sensors is reported using analytical and numerical techniques. It is also shown that experimental results for specific sensors are in excellent agreement with simulation data obtained both with the self developed 1D analytical model as well as the commercial simulation software package CoventorWare. With the aid of the simulation tools optimization of sensor design and fabrication procedure can be achieved.
  • Keywords
    "Micromechanical devices","Thermal sensors","Analytical models","Thermoelectricity","Numerical models","Temperature sensors","Biosensors","Voltage","Electronic mail","Software packages"
  • Publisher
    ieee
  • Conference_Titel
    Microelectronics Proceedings (MIEL), 2010 27th International Conference on
  • Print_ISBN
    978-1-4244-7200-0
  • Type

    conf

  • DOI
    10.1109/MIEL.2010.5490495
  • Filename
    5490495
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=3636073